Synthesis of Multilayer Nanostructures Hf–Ti–N from the Plasma Phase
Crossref DOI link: https://doi.org/10.1134/S1063778823100198
Published Online: 2024-03-04
Published Print: 2023-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Grebenshchikova, M. M.
Mironov, M. M.
Text and Data Mining valid from 2023-12-01
Version of Record valid from 2023-12-01
Article History
Received: 14 June 2023
Revised: 26 July 2023
Accepted: 1 August 2023
First Online: 4 March 2024
CONFLICT OF INTEREST
: The authors of this work declare that they have no conflicts of interest.