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Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

Crossref DOI link: https://doi.org/10.1134/S1063780X16030016

Published Online: 2016-04-01

Published Print: 2016-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Aleksandrov, A. F.

Petrov, A. K.

Vavilin, K. V.

Kralkina, E. A.

Neklyudova, P. A.

Nikonov, A. M.

Pavlov, V. B.

Ayrapetov, A. A.

Odinokov, V. V.

Sologub, V. A.

Pavlov, G. Ya.
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