Plasma Generation upon Gas Ionization by Electronic Sources in the Pressure Range of 1–100 Pa (Review)
Crossref DOI link: https://doi.org/10.1134/S1063780X20010122
Published Online: 2020-03-03
Published Print: 2020-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Klimov, A. S.
Zenin, A. A.
Zolotukhin, D. B.
Tyun’kov, A. V.
Yushkov, Yu. G.
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Article History
Received: 23 January 2019
Revised: 23 January 2019
Accepted: 23 January 2019
First Online: 3 March 2020