On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator
Crossref DOI link: https://doi.org/10.1134/S1063780X21070011
Published Online: 2021-08-02
Published Print: 2021-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Akhmetov, T. D.
Ivanov, A. A.
Shikhovtsev, I. V.
Text and Data Mining valid from 2021-07-01
Version of Record valid from 2021-07-01
Article History
Received: 1 December 2020
Revised: 1 February 2021
Accepted: 18 February 2021
First Online: 2 August 2021