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Study of Distribution of the Electric Field in a Plasma Chamber with Slot Input of Microwave Energy

Published Online: 2021-08-31

Published Print: 2021-08

Authors

Brzhozovskii, B. M.

Martynov, V. V.

Molchanov, S. Yu.

Bahteev, I. Sh.

Dovgan, A. A.
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Text and Data Mining valid from 2021-08-01

Version of Record valid from 2021-08-01
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Article History

Received: 8 July 2020

Revised: 8 July 2020

Accepted: 8 July 2020

First Online: 31 August 2021

Document is current