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Fluid Simulation of the Plasma Characteristics in an Inductively Coupled Plasma Source with Planar and Cylindrical Coils

Published Online: 2023-05-18

Published Print: 2023-04

Authors

Sun, X.

Yang, M.

Chai, S.

Li, H.
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Text and Data Mining valid from 2023-04-01

Version of Record valid from 2023-04-01
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Article History

Received: 17 August 2022

Revised: 28 December 2022

Accepted: 10 January 2023

First Online: 18 May 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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