The Discharge Characteristics of Capacitively Coupled Ar Plasma as the Change of Pressure
Crossref DOI link: https://doi.org/10.1134/S1063780X23600135
Published Online: 2023-07-31
Published Print: 2023-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yin, G. Q.
Wang, J. J.
Yuan, Q. H.
Text and Data Mining valid from 2023-06-01
Version of Record valid from 2023-06-01
Article History
Received: 9 February 2023
Revised: 7 March 2023
Accepted: 20 March 2023
First Online: 31 July 2023
CONFLICT OF INTEREST
: The authors declare that they have no conflicts of interest.