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Planar Magnetron Sputtering System with Electron Injection and Reflecting Electrode

Published Online: 2023-07-31

Published Print: 2023-06

Authors

Shandrikov, M. V.

Cherkasov, A. A.
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Text and Data Mining valid from 2023-06-01

Version of Record valid from 2023-06-01
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Article History

Received: 17 October 2022

Revised: 27 October 2022

Accepted: 2 November 2022

First Online: 31 July 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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