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Effect of Multi-Frequency Excitation on Dust Particle Charging in Weakly Collisional Radio-Frequency Capacitive Discharge

Published Online: 2024-06-25

Published Print: 2024-05

Authors

Missaoui, A.

El Kaouini, M.

Chatei, H.
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Text and Data Mining valid from 2024-05-01

Version of Record valid from 2024-05-01
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Article History

Received: 18 November 2023

Revised: 12 February 2024

Accepted: 20 March 2024

First Online: 25 June 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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