Anomalous distribution of germanium implanted into a SOI dielectric layer after the annealing of radiation defects
Crossref DOI link: https://doi.org/10.1134/S1063782614050170
Published Online: 2014-05-07
Published Print: 2014-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pankratov, E. L.
Gus’kova, O. P.
Drozdov, M. N.
Abrosimova, N. D.
Vorotyntsev, V. M.
Text and Data Mining valid from 2014-05-01