Crossmark

On the nature of cracks using single-crystalline silicon subjected to anodic etching as an example

Published Online: 2014-08-06

Published Print: 2014-08

Authors

Gerasimenko, N. N.

Tynyshtykbaev, K. B.

Starkov, V. V.

Medetov, N. A.

Tokmoldin, S. Zh.

Gosteva, E. A.
License Information

Text and Data Mining valid from 2014-08-01

Version of Record valid from 2014-08-01
More Information

Article History

Received: 30 May 2013

Accepted: 6 December 2013

First Online: 6 August 2014

Document is current