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Specific features of the hydride vapor-phase epitaxy of nitride materials on a silicon substrate

Published Online: 2014-11-06

Published Print: 2014-11

Authors

Mynbaeva, M. G.

Golovatenko, A. A.

Pechnikov, A. I.

Lavrent’ev, A. A.

Mynbaev, K. D.

Nikolaev, V. I.
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Text and Data Mining valid from 2014-11-01

Version of Record valid from 2014-11-01
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Article History

Received: 21 April 2014

Accepted: 28 April 2014

First Online: 6 November 2014

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