Formation of an array of ordered nanocathodes based on carbon nanotubes by nanoimprint lithography and PECVD processes
Crossref DOI link: https://doi.org/10.1134/S1063782614130090
Published Online: 2014-12-17
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gromov, D. G.
Shulyat’ev, A. S.
Egorkin, V. I.
Zaitsev, A. A.
Skorik, S. N.
Galperin, V. A.
Pavlov, A. A.
Shamanaev, A. A.
Text and Data Mining valid from 2014-12-01
Version of Record valid from 2014-12-01
Article History
Received: 17 October 2012
First Online: 17 December 2014