Specific features of NH3 and plasma-assisted MBE in the fabrication of III-N HEMT heterostructures
Crossref DOI link: https://doi.org/10.1134/S1063782615010029
Published Online: 2015-01-08
Published Print: 2015-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Alexeev, A. N.
Krasovitsky, D. M.
Petrov, S. I.
Chaly, V. P.
Mamaev, V. V.
Sidorov, V. G.
Text and Data Mining valid from 2015-01-01