High-efficiency plasma treatment for surface modification of LPCVD ZnO
Crossref DOI link: https://doi.org/10.1134/S1063782615060032
Published Online: 2015-06-07
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Andronikov, D.
Abramov, A.
Terukov, E.
Vinogradov, A.
Ankudinov, A.
Afanasjev, V.
Text and Data Mining valid from 2015-06-01
Version of Record valid from 2015-06-01
Article History
Received: 11 September 2014
Accepted: 23 September 2014
First Online: 7 June 2015