Investigations of nanodimensional Al2O3 films deposited by ion-plasma sputtering onto porous silicon
Crossref DOI link: https://doi.org/10.1134/S1063782615070210
Published Online: 2015-07-01
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Seredin, P. V.
Lenshin, A. S.
Goloshchapov, D. L.
Lukin, A. N.
Arsentyev, I. N.
Bondarev, A. D.
Tarasov, I. S.
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