Improvement in the degradation resistance of silicon nanostructures by the deposition of diamond-like carbon films
Crossref DOI link: https://doi.org/10.1134/S1063782615080126
Published Online: 2015-08-02
Published Print: 2015-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Klyui, N. I.
Semenenko, M. A.
Khatsevich, I. M.
Makarov, A. V.
Kabaldin, A. N.
Fomovskii, F. V.
Han, Wei
Text and Data Mining valid from 2015-08-01