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Study of modification methods of probes for critical-dimension atomic-force microscopy by the deposition of carbon nanotubes

Published Online: 2015-12-17

Published Print: 2015-12

Authors

Ageev, O. A.

Bykov, Al. V.

Kolomiitsev, A. S.

Konoplev, B. G.

Rubashkina, M. V.

Smirnov, V. A.

Tsukanova, O. G.
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Text and Data Mining valid from 2015-12-01

Version of Record valid from 2015-12-01
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Article History

Received: 21 November 2014

First Online: 17 December 2015

Document is current