Study of the surface of GaAs after etching in high-frequency and glow discharge plasma by atomic force microscopy
Crossref DOI link: https://doi.org/10.1134/S106378261602007X
Published Online: 2016-02-19
Published Print: 2016-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dunaev, A. V.
Murin, D. B.
Pivovarenok, S. A.
Text and Data Mining valid from 2016-02-01
