Estimation of the efficiency of the introduction of a porous layer into a silicon-on-sapphire structure substrate to enhance the reliability of devices under irradiation
Crossref DOI link: https://doi.org/10.1134/S1063782616080054
Published Online: 2016-08-02
Published Print: 2016-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Aleksandrov, P. A.
Baranova, E. K.
Budaragin, V. V.
License valid from 2016-08-01