Surface texture of single-crystal silicon oxidized under a thin V2O5 layer
Crossref DOI link: https://doi.org/10.1134/S106378261701016X
Published Online: 2017-02-10
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Nikitin, S. E.
Verbitskiy, V. N.
Nashchekin, A. V.
Trapeznikova, I. N.
Bobyl, A. V.
Terukova, E. E.
License valid from 2017-01-01