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Effect of the energy of bombarding electrons on the conductivity of n-4H-SiC (CVD) epitaxial layers

Published Online: 2017-03-16

Published Print: 2017-03

Authors

Kozlovski, V. V.

Lebedev, A. A.

Strel’chuk, A. M.

Davidovskaya, K. S.

Vasil’ev, A. E.

Makarenko, L. F.
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Text and Data Mining valid from 2017-03-01

Version of Record valid from 2017-03-01
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Article History

Received: 7 September 2016

Accepted: 14 September 2016

First Online: 16 March 2017

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