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Effect of energy density on the target on SnO2:Sb film properties when using a high-speed particle separator

Published Online: 2017-03-16

Published Print: 2017-03

Authors

Parshina, L. S.

Khramova, O. D.

Novodvorsky, O. A.

Lotin, A. A.

Petukhov, I. A.

Putilin, F. N.

Shcherbachev, K. D.
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Text and Data Mining valid from 2017-03-01

Version of Record valid from 2017-03-01
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Article History

Received: 9 August 2016

Accepted: 17 August 2016

First Online: 16 March 2017

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