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Formation of silicon nanocrystals in multilayer nanoperiodic a-SiO x /insulator structures from the results of synchrotron investigations

Published Online: 2017-03-16

Published Print: 2017-03

Authors

Turishchev, S. Yu.

Terekhov, V. A.

Koyuda, D. A.

Ershov, A. V.

Mashin, A. I.

Parinova, E. V.

Nesterov, D. N.

Grachev, D. A.

Karabanova, I. A.

Domashevskaya, E. P.
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Text and Data Mining valid from 2017-03-01

Version of Record valid from 2017-03-01
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Article History

Received: 26 July 2016

Accepted: 15 August 2016

First Online: 16 March 2017

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