Anodic processes in the chemical and electrochemical etching of Si crystals in acid-fluoride solutions: Pore formation mechanism
Crossref DOI link: https://doi.org/10.1134/S1063782617040212
Published Online: 2017-04-21
Published Print: 2017-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ulin, V. P.
Ulin, N. V.
Soldatenkov, F. Yu.
Text and Data Mining valid from 2017-04-01
Version of Record valid from 2017-04-01
Article History
Received: 6 September 2016
Accepted: 26 September 2016
First Online: 21 April 2017