Negative annealing in silicon after the implantation of high-energy sodium ions
Crossref DOI link: https://doi.org/10.1134/S1063782617050141
Published Online: 2017-05-18
Published Print: 2017-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Korol’, V. M.
Zastavnoi, A. V.
Kudriavtsev, Yu.
Asomoza, R.
License valid from 2017-05-01