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Selective etching of Si, SiGe, Ge and its usage for increasing the efficiency of silicon solar cells

Crossref DOI link: https://doi.org/10.1134/S1063782617120028

Published Online: 2017-12-08

Published Print: 2017-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Baidakova, N. A.

Verbus, V. A.

Morozova, E. E.

Novikov, A. V.

Skorohodov, E. V.

Shaleev, M. V.

Yurasov, D. V.

Hombe, A.

Kurokawa, Y.

Usami, N.
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License valid from 2017-12-01