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Patterning approach for detecting defect in device manufacturing

Crossref DOI link: https://doi.org/10.1134/S1063782617120193

Published Online: 2017-12-08

Published Print: 2017-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Vikram, Abhishek

Agarwal, Vineeta
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Text and Data Mining valid from 2017-12-01

Version of Record valid from 2017-12-01
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Article History

Received: 7 February 2016

Accepted: 17 January 2017

First Online: 8 December 2017