Effect of Chemical Treatment of a Silicon Surface on the Quality and Structure of Silicon-Carbide Epitaxial Films Synthesized by Atom Substitution
Crossref DOI link: https://doi.org/10.1134/S1063782618060118
Published Online: 2018-05-15
Published Print: 2018-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kalinkin, I. P.
Kukushkin, S. A.
Osipov, A. V.
Text and Data Mining valid from 2018-05-15
Article History
Received: 31 October 2017
Accepted: 7 November 2017
First Online: 15 May 2018