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Selective Epitaxial Growth of III–N Structures Using Ion-Beam Nanolithography

Published Online: 2018-09-06

Published Print: 2018-10

Authors

Lundin, W. V.

Tsatsulnikov, A. F.

Rodin, S. N.

Sakharov, A. V.

Usov, S. O.

Mitrofanov, M. I.

Levitskii, I. V.

Evtikhiev, V. P.
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Text and Data Mining valid from 2018-09-06

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Article History

Received: 12 March 2018

First Online: 6 September 2018

Document is current