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Formation and Properties of Locally Tensile Strained Ge Microstructures for Silicon Photonics

Crossref DOI link: https://doi.org/10.1134/S1063782618110167

Published Online: 2018-10-18

Published Print: 2018-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Novikov, A. V.

Yurasov, D. V.

Morozova, E. E.

Skorohodov, E. V.

Verbus, V. A.

Yablonskiy, A. N.

Baidakova, N. A.

Gusev, N. S.

Kudryavtsev, K. E.

Nezhdanov, A. V.

Mashin, A. I.
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Article History

Received: 25 April 2018

First Online: 18 October 2018