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Сomposition Depth Profiling of the GaAs Native Oxide Irradiated by an Ar+ Ion Beam

Crossref DOI link: https://doi.org/10.1134/S1063782618160194

Published Online: 2019-02-26

Published Print: 2018-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Mikoushkin, V. M.

Bryzgalov, V. V.

Makarevskaya, E. A.

Solonitsyna, A. P.

Marchenko, D.E.
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First Online: 26 February 2019