Structure and Properties of Zn-Implanted Si Near-Surface Layer Modification Depending on Irradiation Fluence of 132Xe26+ Ions with Energy of 167 MeV
Crossref DOI link: https://doi.org/10.1134/S1063782619030163
Published Online: 2019-04-23
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Privezentsev, V. V.
Kulikauskas, V. S.
Skuratov, V. A.
Zilova, O. S.
Burmistrov, A. A.
Presnyakov, M. Yu.
Goryachev, A. V.
Text and Data Mining valid from 2019-03-01
Article History
Received: 4 September 2018
Accepted: 10 September 2018
First Online: 23 April 2019