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Effect of Ion-Beam Processing during RF Magnetron Sputtering on the properties of ZnO Films

Published Online: 2019-11-06

Published Print: 2019-11

Authors

Krylov, P. N.

Alalykin, A. S.

Durman, E. A.

Zakirova, R. M.

Fedotova, I. V.
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Text and Data Mining valid from 2019-11-01

Version of Record valid from 2019-11-01
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Article History

Received: 21 March 2019

Revised: 7 June 2019

Accepted: 17 June 2019

First Online: 6 November 2019

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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