Investigation of the Initial Silicon-on-Sapphire Layer Formed by CVD Techniques
Crossref DOI link: https://doi.org/10.1134/S1063782619150065
Published Online: 2020-01-09
Published Print: 2019-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fedotov, S. D.
Sokolov, E. M.
Statsenko, V. N.
Romashkin, A. V.
Timoshenkov, S. P.
Text and Data Mining valid from 2019-12-01
Version of Record valid from 2019-12-01
Article History
Received: 12 February 2018
Revised: 27 April 2018
Accepted: 19 June 2018
First Online: 9 January 2020