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Temperature Dependence of Losses in Mechanical Resonator Fabricated via the Direct Bonding of Silicon Strips

Published Online: 2020-03-03

Published Print: 2020-01

Authors

Prokhorov, L. G.

Svetaev, A. V.

Lunin, B. S.

Zapotylko, N. R.

Katkov, A. A.

Mitrofanov, V. P.
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Text and Data Mining valid from 2020-01-01

Version of Record valid from 2020-01-01
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Article History

Received: 19 August 2019

Revised: 5 September 2019

Accepted: 10 September 2019

First Online: 3 March 2020

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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