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Formation of Semipolar Group-III-Nitride Layers on Textured Si(100) Substrates with Self-Forming Nanomask

Published Online: 2022-02-06

Published Print: 2021-04

Authors

Bessolov, V. N.

Konenkova, E. V.

Rodin, S. N.

Kibalov, D. S.

Smirnov, V. K.
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Text and Data Mining valid from 2021-04-01

Version of Record valid from 2021-04-01
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Article History

Received: 26 November 2020

Revised: 30 November 2020

Accepted: 30 November 2020

First Online: 6 February 2022

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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