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Diffusion of Germanium from a Buried SiO2 Layer and Formation of a SiGe Phase

Published Online: 2022-05-18

Published Print: 2022-03

Authors

Tyschenko, I. E.

Khmelnitsky, R. A.

Saraykin, V. V.

Volodin, V. A.

Popov, V. P.
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Text and Data Mining valid from 2022-03-01

Version of Record valid from 2022-03-01
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Article History

Received: 15 September 2021

Revised: 23 September 2021

Accepted: 23 September 2021

First Online: 18 May 2022

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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