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Ion Doping of Silicon Carbide in the Technology of High-Power Electronic Devices (Review)

Published Online: 2023-04-02

Published Print: 2022-12

Authors

Afanasev, A. V.

Ilyin, V. A.

Luchinin, V. V.
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Text and Data Mining valid from 2022-12-01

Version of Record valid from 2022-12-01
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Article History

Received: 2 March 2022

Revised: 28 March 2022

Accepted: 7 July 2022

First Online: 2 April 2023

CONFLICT OF INTEREST

: We declare that we have no conflicts of interest.

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