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Investigation of the Chemical Composition of Films Deposited by the Electric-Arc Sputtering of Graphite and Titanium from Two Sources

Published Online: 2023-04-02

Published Print: 2022-12

Authors

Khamdokhov, Z. M.

Margushev, Z. Ch.

Kalazhokov, Z. Kh.

Kalazhokov, Kh. Kh.

Levin, D. D.
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Text and Data Mining valid from 2022-12-01

Version of Record valid from 2022-12-01
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Article History

Received: 26 July 2021

Revised: 26 July 2021

Accepted: 11 October 2021

First Online: 2 April 2023

Document is current