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Investigation of the Dependence of the Silicon Needle Shape on the KOH Solution Concentration during Anisotropic Wet Etching

Published Online: 2024-02-15

Published Print: 2023-01

Authors

Novak, A. V.

Sokolov, A. M.

Rumyantsev, A. V.

Novak, V. R.
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Text and Data Mining valid from 2023-01-01

Version of Record valid from 2023-01-01
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Article History

Received: 9 December 2022

Revised: 16 February 2023

Accepted: 30 March 2023

First Online: 15 February 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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