Crossmark

Simulation of Material Sputtering and Gallium Implantation during Focused Ion Beam Irradiation of a Silicon Substrate

Published Online: 2024-02-15

Published Print: 2023-01

Authors

Podorozhniy, O. V.

Rumyantsev, A. V.

Volkov, R. L.

Borgardt, N. I.
License Information

Text and Data Mining valid from 2023-01-01

Version of Record valid from 2023-01-01
More Information

Article History

Received: 3 April 2023

Revised: 26 April 2023

Accepted: 8 August 2023

First Online: 15 February 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

Document is current