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High-Temperature Diffusion of the Acceptor Impurity Be in AlN

Published Online: 2024-03-14

Published Print: 2023-09

Authors

Kazarova, O. P.

Nagalyuk, S. S.

Soltamov, V. A.

Muzafarova, M. V.

Mokhov, E. N.
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Text and Data Mining valid from 2023-09-01

Version of Record valid from 2023-09-01
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Article History

Received: 8 November 2021

Revised: 12 November 2021

Accepted: 12 November 2021

First Online: 14 March 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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