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Plasma Chemical Deposition of Hydrogenated DLC Films with Different Hydrogen and sp3-Hybrid Carbon Content

Published Online: 2024-08-30

Published Print: 2024-01

Authors

Okhapkin, A. I.

Drozdov, M. N.

Yunin, P. A.

Kraev, S. A.

Radishev, D. B.
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Text and Data Mining valid from 2024-01-01

Version of Record valid from 2024-01-01
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Article History

Received: 5 May 2023

Revised: 29 June 2023

Accepted: 6 July 2023

First Online: 30 August 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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