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Studies of Structural and Mechanical Properties of AlGaN Thin Films on Nano-SiC/Si Hybrid Substrates

Published Online: 2024-09-02

Published Print: 2024-02

Authors

Grashchenko, A. S.

Kukushkin, S. A.

Sharofidinov, S. S.
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Text and Data Mining valid from 2024-02-01

Version of Record valid from 2024-02-01
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Article History

Received: 16 May 2023

Revised: 3 August 2023

Accepted: 30 October 2023

First Online: 2 September 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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