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Plasma Enhanced Atomic Layer Deposition of InP Layers and Multilayer InP/GaP Structures on Si Substrate

Published Online: 2024-09-02

Published Print: 2024-02

Authors

Gudovskikh, A. S.

Uvarov, A. V.

Baranov, A. I.

Vyacheslavova, E. A.

Maksimova, A. A.

Kirilenko, D. A.
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Text and Data Mining valid from 2024-02-01

Version of Record valid from 2024-02-01
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Article History

Received: 24 August 2023

Revised: 1 September 2023

Accepted: 1 September 2023

First Online: 2 September 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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