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Surface Morphology of AlN Layers Grown on a Nano-Structured SiNx/Si(100) Template

Published Online: 2024-09-16

Published Print: 2024-04

Authors

Bessolov, V. N.

Konenkova, E. V.

Rodin, S. N.

Solomnikova, A. V.
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Text and Data Mining valid from 2024-04-01

Version of Record valid from 2024-04-01
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Article History

Received: 7 February 2024

Revised: 28 February 2024

Accepted: 28 February 2024

First Online: 16 September 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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