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Study of the Multilayer Growth of Polysilicon Layers for Controlling the Deformation of Silicon Structures in the Chemical Vapor Transport Technology

Published Online: 2025-03-05

Published Print: 2024-12

Authors

Tarasov, D. V.

Sokolov, E. M.

Gavrilov, S. A.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 1 February 2024

Revised: 3 May 2024

Accepted: 10 October 2024

First Online: 5 March 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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