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The Influence of Focused Ion Beam Scanning Strategy on the Silicon Sputtering Process During the Formation of Micro- and Nanostructures

Published Online: 2026-01-13

Published Print: 2025-12

Authors

Rumyantsev, A. V.

Borgardt, N. I.

Volkov, R. L.
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Text and Data Mining valid from 2025-12-01

Version of Record valid from 2025-12-01
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Article History

Received: 27 November 2024

Revised: 3 December 2024

Accepted: 17 June 2025

First Online: 13 January 2026

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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