Synthesis of epitaxial silicon carbide films through the substitution of atoms in the silicon crystal lattice: A review
Crossref DOI link: https://doi.org/10.1134/S1063783414080137
Published Online: 2014-08-06
Published Print: 2014-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kukushkin, S. A.
Osipov, A. V.
Feoktistov, N. A.
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